| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of efficiently performing the reduction of power consumption, the increase of the producing quantity of ozone or the like in the apparatus for producing ozone by providing two pieces of single electrode-type gas filling discharge tubes in parallel and applying high frequency voltage to the electrode. SOLUTION: As a typical example, two pieces of single electrode-type gas-filled discharge tubes are provided with electrodes 3 and 4, respectively, to only one end of glass tubes 1 and 2 filled with a gas at≤400 Torr pressure. Drawing out parts 7 and 8 of the respective electrodes are covered with bushings 9 and 10. The two pieces of discharge tubes are provided to be opposed to each other and to be adjacent to each other in nearly parallel and the high frequency voltage is applied to the two pieces of the discharge tubes. COPYRIGHT: (C)2004,JPO&NCIPI
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