发明名称 |
Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laser |
摘要 |
An on-board diagnostic tool can be used to monitor the spectral purity of a lithography laser, such as an excimer or molecular fluorine laser, instead of simply measuring the FWHM bandwidth of the laser. One such on-board tool utilizes a Fabry-Perot Interferometer etalon with a high-finesse and a small free spectral range, which provides the precision necessary to determine spectral purity, while providing the small footprint and light weight necessary to use the tool on-board. A high signal-to-noise detector can be used to improve the accuracy of the measurements.
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申请公布号 |
US2004141182(A1) |
申请公布日期 |
2004.07.22 |
申请号 |
US20030732094 |
申请日期 |
2003.12.10 |
申请人 |
SCHRODER THOMAS;BALD HOLGER;ALBRECHT HANS-STEPHAN;SCHMIDT THOMAS;SCHRAMM CHRISTIAN |
发明人 |
SCHRODER THOMAS;BALD HOLGER;ALBRECHT HANS-STEPHAN;SCHMIDT THOMAS;SCHRAMM CHRISTIAN |
分类号 |
G01J3/26;(IPC1-7):G01B9/02 |
主分类号 |
G01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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