| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact which exhibits stable volume resistivity even when the firing temperature is changed, an electrostatic chuck, and a method of manufacturing the aluminum nitride sintered compact. <P>SOLUTION: The aluminum nitride sintered compact is manufactured by mixing an aluminum nitride powder containing calcium in an amount of 50-150 ppm and an oxide additive, then calcining the resulting mixed powder, forming the calcined powder, and sintering. The volume resistivities of the aluminum nitride sintered compacts thus obtained, each containing calcium in an amount of 40-140 ppm, varies only on 0.1-0.3 figure level even when the sintering temperatures are changed in a range of 1,850-1,950°C. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
