发明名称 DEVICE OF SEPARATING AND HOLDING THIN PLATE
摘要 PROBLEM TO BE SOLVED: To provide a device to separate and hold a thin plate without damaging a polishing surface. SOLUTION: The device is provided with: an arm 1 wherein base ends of linearly paired segments 2 and 3 are coupled to each other with a hinge pin 4, and two slings 7 interlocked with a vertically movable moving supporter 6 in their upper ends and also interlocked with the tips of both segments in their lower ends, hook the arm 1 so that the arm 1 is foldable in its perpendicular plane; a bracket 9 whose base part is mounted to the upper surface of base end of the one segment and whose tip extends upward with a slope above the base end of the other segment; a folding angle adjusting screw 10 screwed in the tip of the bracket and pressing the upper surface of the base end of the other segment; and V-shaped pawls 13 with at least acute-angled tip lower parts respectively, oppositely arranged in a properly lowered position below the tips of both segments, and to be engaged with the side edges of the thin plate W. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004202672(A) 申请公布日期 2004.07.22
申请号 JP20030077717 申请日期 2003.03.20
申请人 TOSHIBA CERAMICS CO LTD 发明人 YOOKAICHIYA MOTOO;TSUJIMOTO KENICHI
分类号 B24B41/06;H01L21/677;H01L21/68;(IPC1-7):B24B41/06 主分类号 B24B41/06
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