| 摘要 |
PROBLEM TO BE SOLVED: To enhance respective capabilities of a speed, moving resolution, and thrust without being regulated only by a specification of a motor, a specification of a feed screw shaft, and accuracy when moving a slide body by driving the feed screw shaft by the motor. SOLUTION: This slide driving device has a ball screw shaft 10 as the feed screw shaft, a slide table 20 for rotatably holding a nut 30 for threadedly engaging with the screw shaft 10 and slidingly moving together with the nut 30, the first motor 11 for rotatably driving the screw shaft 10, a first brake 13b for stopping the screw shaft 10, the second motor 31 for rotatably driving the nut 30 and a second brake 33b for stopping the nut 30. COPYRIGHT: (C)2004,JPO&NCIPI
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