METHOD FOR MEASURING STRAIN OF MICROSTRUCTURE

摘要

PURPOSE: A method for measuring the stain of a microstructure is provided to improve resolution by placing a zoom lens and to improve processing speed by removing a pre-treatment process of an object. CONSTITUTION: A method for measuring the stain of a microstructure comprises the steps of obtaining images of two points of a test piece(2) by using an objective lens(4), separating the images by a beam splitter(6), obtaining images by making the separated images pass through a zoom lens(10a) and imaging the images by a camera(12a), recognizing a pattern from the obtained images, and calculating displacement at each position by tracing the recognized pattern.