| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator where any poor contact is unlikely to occur, and the deterioration of the characteristics thereof is suppressed. SOLUTION: The actuator 1 includes a piezoelectric substrate 2 composed of a piezoelectric porcelain, a plurality of surface electrodes 9a provided on a part of the principal surface of the piezoelectric substrate 2, a plurality of internal electrodes 9b provided in the piezoelectric substrate 2, a via electrode 9c for electrically connecting the foregoing electrodes, and a support member 3 bonded via a bonding layer to the piezoelectric substrate 2. In the actuator 1, the thickness of the whole is≤100μm, and end surfaces of the via electrodes 9c make contact with the principal surfaces of all the internal electrodes 9b to which voltage is applied. COPYRIGHT: (C)2004,JPO&NCIPI
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