| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a titanium oxide film having high adhesiveness to a substrate, a high hardness and a catalytic function. SOLUTION: The method for forming a titanium oxide film, in which the titanium oxide (TiO<SB>2</SB>) film is formed on a solid material, comprises the steps of forming a layer of a solution containing an active titanium oxide with a catalytic function on the solid material; and converting the solution layer to a solid film adhering to the solid material at a lower temperature than about 250°C. According to such a method, a solid film having a specified hardness and a catalytic function because of being active can be formed while suppressing the deterioration of the solid material, even if the solid material is a material that may be deteriorated at high temperatures. COPYRIGHT: (C)2004,JPO&NCIPI
|
