| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device capable of certainly removing a resin deposited on an object to be washed in a short time. SOLUTION: The washing device 1 for carrying out removal of a deposition substance deposited on the object to be washed is provided with a washing tank 2 for storing the object to be washed; a spraying nozzle 3 for spraying a washing liquid into the washing tank 2; a washing liquid circulation means 4 for feeding the washing liquid removed out from the washing tank 2 to the spraying nozzle 3; and a gas mixing means 5 for mixing a gas into the washing liquid when the washing liquid is sprayed from the spraying nozzle 3. In the gas mixing means 5, an amount of gas mixed into the washing liquid can be adjusted. COPYRIGHT: (C)2004,JPO&NCIPI
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