发明名称 |
Scanning probe microscope with improved probe head mount |
摘要 |
A scanning probe microscope uses two different scanners (also called "scanning stages") that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called "x-y scanner") scans a sample in a plane (also called "x-y plane"), while the other scanner (called "z scanner") scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called "z direction") perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
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申请公布号 |
US2004140426(A1) |
申请公布日期 |
2004.07.22 |
申请号 |
US20040755750 |
申请日期 |
2004.01.12 |
申请人 |
PSIA CORPORATION |
发明人 |
KWON JOONHYUNG;KIM YOUNG SEOK;PARK SANG-IL |
分类号 |
G01B21/30;G01Q10/02;G01Q10/04;G01Q20/02;G01Q30/00;G01Q60/32;G01Q60/38;G01Q70/02;G01Q70/10;H01J37/26;(IPC1-7):H01J3/14;H01J5/16 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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