发明名称 TUNING FORK TYPE INERTIAL SENSOR ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To improve an unbalance in inertial mass of tuning fork type inertial sensor element. <P>SOLUTION: In a tuning fork type inertial sensor element of this invention using a tuning fork type vibrator having at least two legs projecting from a base in parallel to Y-axis, resolution of the problem is to make the shape relation W<SB>1</SB><W<SB>2</SB>, where W<SB>1</SB>is the width dimension of the two legs and W<SB>2</SB>is the width dimension of the base. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004205426(A) 申请公布日期 2004.07.22
申请号 JP20020377072 申请日期 2002.12.26
申请人 KINSEKI LTD 发明人 HANJI MOTOYASU;KONO SHUICHI;ISHIZUKA TOMOSHIGE;IBUSUKI KATSUHIDE;KAWAI RYOTA
分类号 G01P9/04;G01C19/56;H01L41/08;H01L41/18 主分类号 G01P9/04
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