| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in conventional semiconductor electrostatic motor that charges accumulate on the surface since a lower bearing 31 and an upper bearing 41 are insulators, and restrain the rotation of a movable body 1 and prevent the high-speed rotation with irregular rotation. SOLUTION: The semiconductor electrostatic motor has the above movable body 1 retaining charges to act by the outside charges or voltage, a stator 2 which acts by voltage, an impurity doped part 1a which is arranged on the surface of the movable body 1 opposed to the stator 2, an impurity doped part 2b for the stator which is arranged on the surface of the stator 2 opposed to the movable body 1, a shaft 5 which is buried in the vicinity of the center of the movable body 1, and bearings 31 and 41 which support the above shaft 5. The above bearings 31 and 41 are conductors. Consequently, a semiconductor electrostatic motor free of irregular rotation and capable of high-speed rotation can be obtained. COPYRIGHT: (C)2004,JPO&NCIPI
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