METHOD FOR GENERATING OZONE

摘要

A method for generating ozone wherein a high purity oxygen gas is supplied to an electric discharge type ozonizer, to generate ozone, wherein an oxygen carbide gas (CxOy gas) and a nitrogen gas are added in combination to the high purity oxygen gas to be supplied. The oxygen carbide gas (CxOy gas) is typically carbon dioxide, carbon monoxide or a mixture thereof. The method allows the prevention of the reduction of the concentration of ozone, with the prevention of the adverse effect by the addition of a nitrogen gas. Specifically, the amount of an added nitrogen gas can be suppressed to 0.01 % or less, which is the level exhibiting no adverse effect, and simultaneously, the amount of an added oxygen carbide gas (CxOy gas) can be suppressed to 1.0 % or less, which is the level providing good economy.