| 摘要 |
PROBLEM TO BE SOLVED: To form a film with antireflection effect etc., on a slanting film varying in optical characteristic with the film thickness. SOLUTION: An optical filter is manufactured by forming a film (d) which has nearly uniform film thickness and antireflection effect etc., by vapor deposition on the slanting film after the slanting film (b) varying in optical characteristic with the film thickness is formed on a substrate (a) by vapor deposition. COPYRIGHT: (C)2004,JPO&NCIPI
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