PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a high-precision pressure sensor which poses few troubles of the sensor section and prevents misdetection. SOLUTION: The pressure sensor is configured with a plurality of sensor sections 4 arranged into a matrix form. In each sensor section 4, a pair of electrodes are arranged in one-to-one correspondence, across a hollow section 10. The lower first electrode 8 is covered with a first insulating film 13, in which a sensor hole 14 is formed to expose a part of the first electrode 8 in the film 13. When pressure is applied to the sensing section 4, the upper second electrode 9 bends toward the side of the first electrode 8, and comes into contact with the first electrode 8 exposed in the sensor hole 14. COPYRIGHT: (C)2004,JPO&NCIPI