MEASURING METHOD AND DEVICE FOR VIBRATION FREQUENCY OF MULTI-CANTILEVER

摘要

A measuring method and device for the vibration frequency of a multi-cantilever which eliminate the need of incorporating an exciting or detecting element in each cantilever and simplify the structure of cantilevers by means of optical pumping and optical measuring, and can provide high Q values, and diversities of high-frequency operations and modification methods to cantilevers. A cantilever array (11) in which the natural frequencies of cantilevers (2-n) are mutually different is used, and their natural frequencies are sequentially excited by modulating optical excitation to measure the vibrations by a laser Doppler meter.