| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency power supply device capable of detecting abnormality of a detection part. <P>SOLUTION: This high-frequency power supply device is equipped with an output setting part 10 for outputting an output setting signal V<SB>set</SB>of a progressive wave power, a power output part 20 for performing feedback control so that the magnitude of a first progressive wave power detection signal Vpf1 becomes equal to the magnitude of the output setting signal V<SB>set</SB>and outputting the progressive wave power, an output voltage detection part 41 for detecting the voltage on a transmission line between the power output part 20 and the output end of the high-frequency power supply device or the voltage of an equivalent spot, and a comparison determination part 50 for determining whether the first power detection part 30 is normal or not by comparing a power value corresponding to a voltage value detected by the output voltage detection part 41 with an output setting value of the progressive wave power. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
