摘要 |
The invention is a microfabricated silicon cantilever with a stiffness appropriate to resolve forces of interest in working with micro objects. Stiffnesses may range from about 10 piconewtons per micron of deflection, to about 1 millinewton per micron of deflection. There is a set of micro weights of appropriate masses that is used to calibrate the force gages. The weights are captive to a ring on a handle so that they are free to move, but will not get lost.
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