发明名称 |
DEVICE AND METHOD FOR MICROWAVE PLASMA PROCESSING AND MICROWAVE POWER SUPPLY DEVICE |
摘要 |
A microwave plasma processing apparatus includes a processing vessel, a microwave generator, a waveguide guiding a microwave formed by the microwave generator, and a microwave emitting member emitting the microwave with wavelength compression by a retardation plate, wherein the waveguide has a single microwave output opening in a location corresponding to a central par of the microwave emitting member. <IMAGE> <IMAGE> |
申请公布号 |
EP1439571(A1) |
申请公布日期 |
2004.07.21 |
申请号 |
EP20020775374 |
申请日期 |
2002.10.18 |
申请人 |
GOTO, NAOHISA;OHMI, TADAHIRO;TOKYO ELECTRON LIMITED |
发明人 |
GOTO, NAOHISA;OHMI, TADAHIRO;HIRAYAMA, MASAKI;GOTO, TETSUYA |
分类号 |
H01J37/32;H05H1/46;B01J19/08;C23C16/511;H01L21/205;H01L21/302;H01L21/3065 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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