Electron beam apparatus and detector arrangement

摘要

A beam generator (8) generates an electron beam. An objective lens (12) focuses the electron beam on an object (18). A detector (19,21) detects electrons scattered on the object or emitted by the object. An adjustable screen (20) is assigned to the detector. An adjusting device (22) adjusts the position of the screen. An Independent claim is also included for a detector system for detecting electrons, i.e. for an electron beam device/scanning electron microscope, with a detector fitted with a reflector to reflect electrons onto the detector.