发明名称 |
WORK HOLDING PANEL FOR POLISHING, AND DEVICE AND METHOD FOR POLISHING |
摘要 |
The present invention is a workpiece holder for polishing comprising at least a workpiece holder body having multiple perforated holes for holding a workpiece by vacuum adsorption and a back plate disposed on the back side of the body, which is provided with temperature controlling means or cooling means for the holder body. Thus, there is provided a workpiece holder for polishing, a polishing apparatus and a polishing method, which can provide a workpiece having good flatness by suppressing thermal deformation of the workpiece holder body and deformation of a resin film coated on the workpiece holding surface without degrading flatness of a workpiece held on the workpiece holder in the polishing of the workpiece, even when the number of polishing operation increases. <IMAGE> |
申请公布号 |
EP1199135(A4) |
申请公布日期 |
2004.07.21 |
申请号 |
EP20010915815 |
申请日期 |
2001.03.27 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD |
发明人 |
OKAMURA, KOUICHI;TAMAI, NOBORU;MORITA, KOUZI;MASUMURA, H. |
分类号 |
B24B37/30;B24B49/14;H01L21/683;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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