STEAM TRANSACTION DEVICE FOR EFFICIENTLY REMOVING PARTICLES OR ORGANICS ATTACHED ONTO WORKPIECE BY SPRAYING STEAM TO WORKPIECE

摘要

PURPOSE: A steam transaction device is provided to efficiently remove particles or organics attached on a workpiece by spraying steam to the workpiece, to reduce the amount of exhaust gas, and to decrease the costs for steam processing. CONSTITUTION: A steam transaction device comprises a steam processing unit(10) consisting of a steam spray nozzle(2) for spraying steam(G1) for steam processing toward a workpiece(A), an exhaust tool(5) installed near the steam spray nozzle and discharging a portion of steam(G2) after steam processing out of a field and a cooling member(6) for cooling the steam after steam processing. A passage(15) through which condensate liquid(L2) condensed by the cooling member is formed between the surface of the workpiece and the steam processing unit.