| 摘要 |
The invention relates to a vertical Hall sensor in which an electroconductive region (2) extends into a substrate (1), perpendicularly to the surface of said substrate (1), in order to form a Hall sensor element (4), and comprises a plurality of first connection areas (3) along a lateral surface on the surface of the substrate (1). The inventive Hall sensor is characterised in that at least one second similar Hall sensor element (5) is arranged in the substrate (1) parallel to the first Hall sensor element (4), and is connected to the first Hall sensor element (4) in such a way that when the Hall sensor is operated according to the spinning current technique, the same combination of control current distributions is obtained in the Hall sensor in each spinning current phase. When the inventive vertical Hall sensor is operated according to the spinning current technique, it enables the offset to be significantly reduced without requiring a weighting of the individual spinning current phases. |
