| 摘要 |
PURPOSE: A wafer fixing apparatus for a scratch tester is provided to quickly and simply test wafers of various sizes without replacing a table by easily fixing and separating the wafers regardless of the size of the wafer. CONSTITUTION: A table(10) has a support surface(11) to which the bottom surface of a wafer(W) is closely attached. The first fixing member(20) fixes the flat zone of the wafer, installed in a side of the support surface. At least one of the second fixing member(30) is installed to be transferred and fixed along the long hole(12) formed in the table and fixes/unfixes the round zone of the wafer, correspondingly disposed in a position opposite to the first fixing member.
|
