| 摘要 |
An ingot is placed below parallel wires of a multiwire saw, and the wires are driven to run. The ingot is moved upward and cut by the wires to obtain wafers. The wires are displaced toward one side of cut surfaces of the wafers. By lowering the wafers as the wires remains displaced toward the one side of cut surfaces of the wafers, the wires are pulled out of the wafers without contacting the other side cut surfaces of the wafers. Thus, the multiwire saw does not cause any damage to major surfaces of the wafers and is used many times without cutting the wires.
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