Integrated vertical stack capacitor

摘要

An integrated circuit capacitor (60) uses multiple electrically conductive stacks (63-68, 70) to optimize capacitance density. A second stack (70) is a first nearest neighbor to a first stack (66). A third stack (65) is a second nearest neighbor to the first stack. Each of the three stacks defines vertices of an isosceles triangle (20) formed in a plane substantially perpendicular to the three stacks. The isosceles triangle does not have a ninety degree angle. The isosceles triangle may also be implemented as an equilateral triangle.