CAPACITIVE TYPE MICROELECTROMECHANICAL RF SWITCH

摘要

A capacitive type MEMS switch (10) having a conductor arrangement comprised of first and second RF conductors (12, 13) deposited on a substrate (14). A bridge member (21) having a central enlarged portion (16) is positioned over the conductor arrangement. In one embodiment, the first RF conductor has an end defining an open area (28) in which is positioned a pull down electrode< >(38), with the end of the first RF conductor substantially surrounding the pull down electrode. In another embodiment, two opposed RF conductors, each having ends with first and second branches, define an open area in which a pull down electrode is positioned. A dielectric layer (36) is deposited on the conductor arrangement such that when a pull down voltage is applied to the pull down electrode, the switch impedance is significantly reduced so as to allow signal propagation between the RF conductors.