Determination of the attributes of rotational movements of a black and white object or other two-color object for monitoring objects with rotating assemblies, e.g. semiconductor wafers, fans, turbines, wind power plant

摘要

Method for determining the attributes of rotational movements of a black and white object (100), whereby an image (200) of the object is generated on a sensor (500) such that the image rotates synchronously with the object. A multiple of linear partial images (300) are obtained sequentially and the differences between the partial images are evaluated in order to derive their attributes. The invention also relates to a corresponding use of the method for monitoring objects with rotating assemblies, e.g. semiconductor wafers, fans, turbines, wind power plant.