| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor wherein the bottoms of counterbores are formed into spherical concaves which are close to a concave curved surface into which a workpiece is bent due to its dead weight, which can prevent the slippage of the workpiece when it is carried in and placed, and which can heat the workpiece with a high in-plane uniformity; and also to provide a method of manufacturing the same. SOLUTION: In the susceptor which is such that a carbon basic material 1 is coated with a ceramic film, the bottoms of the counterbores whereon the workpiece is to be placed are formed into spherical concaves, and there is a fine unevenness 1b formed, and a distance H between a top face 1e of a plurality of convex sections whereon the workpiece is to be placed and a bottom face 1g of a plurality of concave sections is nearly the same over the entire region, and a thickness L of the bottoms of the counterbores is formed nearly uniformly over the entire region. COPYRIGHT: (C)2004,JPO&NCIPI |
