| 摘要 |
PROBLEM TO BE SOLVED: To impart thrust without generating distortion to a surface plate, and to contribute to space saving. SOLUTION: A gas chamber 30 driving a body 6 in a first direction by gas and a driving device 31 driving the body 6 in the first direction by an electro-magnetic force are mounted. The gas chamber 30 has a first moving section 63 supporting the body 6 and being freely moved in the first direction, and a second moving section 65 integrally moved in an opposed state relative to the first moving section 63 by the driving device 31. COPYRIGHT: (C)2004,JPO&NCIPI |
