DEVICE AND METHOD FOR ASSEMBLING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To solve a problem associated with worsening of positioning accuracy and so on, due to deformation of substrates caused by deformation of a vacuum chamber via a table, in reducing pressure inside the vacuum chamber in a device for assembling the substrates constructed by fixing the table to hold the substrates in the vacuum chamber. SOLUTION: A hollow part 46 is provided in a region of a lower side table 24 in a lower side chamber T1 fixing the lower side table 24. The device for assembling the substrates is constructed so as to prevent deformation of the lower side table and the substrates in reducing the pressure in the vacuum chamber by simultaneously reducing the pressure in the hollow part 46 to the same reduced pressure level and preventing the deformation of the lower side chamber T1. COPYRIGHT: (C)2004,JPO&NCIPI