| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid electrolyte composed of a silicon compound thin film, and to provide a storage element using it. SOLUTION: Metal chloride, such as LiBF<SB>4</SB>, is added to the thin film which contains at least one of polysilane that is soluble to an organic solvent and a silicon compound that is expressed in a general formula (1)(in the formula, R<SB>1</SB>to R<SB>12</SB>represent radicals chosen from groups consisting of aliphatic hydrocarbon radicals which may be replaced with halogen of carbon number 1 to 10 or glycidyl oxy-radicals, with aromatic hydrocarbon radicals of carbon number 6 to 12 and with alkoxy radicals of carbon number 1 to 8, R<SB>1</SB>to R<SB>12</SB>may be same or different, and a, b, c and d that are integers including 0 satisfy a + b + c + d≥1). The thin film is formed by baking, for example, at a temperature of≥400°C. COPYRIGHT: (C)2004,JPO&NCIPI
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