Spectroscopic ellipsometer wafer mapper for DUV to IR

摘要

The present invention provides a wafer mapper for imaging large objects such as semiconductor wafers. In operation, the wafer mapper provides spectroscopic ellipsometric data or broadband ellipsometric data for the entire sample being analyzed. This data is provided via either a line scan or a wavelength scan and greatly reduces the time required to map an entire wafer in terms of film thickness, index of refraction, dielectric constant or other measurements.