Piezoelectric devices mounted on integrated circuit chip

摘要

The invention is a filter circuit that includes an electromechanical resonator that is mounted directly to the surface of a silicon integrated circuit, rather than being mounted as a surface mounted or leaded filter can on a circuit board. This filter system allows the integrated circuit electronic package to be significantly smaller than when a conventional electromechanical resonator package is used. The electromechanical resonator may be protected during processing and during use with a protective cover that is made of a material such as titanium. The protective cover is attached to the integrated circuit chip.