| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of reducing power consumption while maintaining through-put. <P>SOLUTION: A substrate treatment device 1 is selectively provided with not only a normal mode for starting all units but also an energy saving mode. When the latter is selected, only a necessary unit which is absolutely necessary for substrate treatment is started, and applied to the substrate treatment. When it is necessary to increase treatment efficiency, an additional unit may be started, and applied to the substrate treatment. In a stand-by state, only the necessary unit may be started while others are stopped, or all the units may be stopped. Also, even when the normal mode is selected, transition to the energy saving mode is made executable after the continuity of a stand-by state in a fixed time or longer. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
