发明名称 LASER DEVICE AND ALIGNER USING THE SAME
摘要 PROBLEM TO BE SOLVED: To improve throughput and resolution in an MOPO laser device. SOLUTION: This laser device is provided with a first laser resonator which generates by resonance a laser beam, including at least a first wavelength element and a second wavelength element, a second laser resonator which amplifies by resonance the laser beam generated by the first laser resonator, and a wavelength-selecting means which emits in different directions the first wavelength element and second wavelength element, included in the laser beam which is emitted from the second laser resonator and made incident on the wavelength-selecting means. The wavelength-selecting means is arranged outside of the laser beam emitting side of the second laser resonator. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004200536(A) 申请公布日期 2004.07.15
申请号 JP20020369239 申请日期 2002.12.20
申请人 GIGAPHOTON INC;USHIO INC;KOMATSU LTD 发明人 WAKABAYASHI OSAMU;SEKI TADAHIRA
分类号 G03F7/20;H01L21/027;H01S3/00;H01S3/137;H01S3/23;(IPC1-7):H01S3/137 主分类号 G03F7/20
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