| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure on a base board for effectively preventing adsorption of a beam part and the base board, and an easy projection forming method used for the structure. SOLUTION: This structure on the base board has on the base board 10 a plate-like beam part A1 having a fixing part 13a fixed to the base board and the moving end 13b for changing an interval with the base board, and separates a part except for the fixing part from the base board by removing a sacrifice layer after forming the plate-like beam part on the base board via the sacrifice layer 11, and has an adsorption preventive structure composed of a plurality of conical projections P1 in a part opposed to the plate-like beam part A1 in an upper surface of the base board 10 or an adsorption preventive structure composed of a plurality of projections having the random height on one main surface opposed to the base board of the plate-like beam part. COPYRIGHT: (C)2004,JPO&NCIPI
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