发明名称 |
Semiconductor device and method of fabricating the same, nonvolatile semiconductor memory and method of fabricating the same, and electronic apparatus including nonvolatile semiconductor memory |
摘要 |
A semiconductor device according to an aspect of the present invention having a first gate insulating film formed in a first active region of a semiconductor substrate and having a first film thickness, and a second gate insulating film formed in a second active region of the semiconductor substrate and having a second film thickness smaller than the first film thickness, wherein a semiconductor substrate surface in the first active region is lower than that in the second active region is provided.
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申请公布号 |
US2004135198(A1) |
申请公布日期 |
2004.07.15 |
申请号 |
US20030623520 |
申请日期 |
2003.07.22 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MURAHAMA YUUICHIRO |
分类号 |
H01L21/316;H01L21/762;H01L21/8234;H01L21/8238;H01L21/8247;(IPC1-7):H01L29/76 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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