发明名称 |
Electronic device, production method thereof, and plasma process apparatus |
摘要 |
A plasma process apparatus for performing a plasma process on a target substrate 4 includes a process chamber 5 in which the target substrate 4 is installed, a gas inlet 6 for introducing a gas into the process chamber 5, and a plasma discharge production section 15 provided in the process chamber 5. The plasma discharge production section 15 includes a first electrode 2a and a second electrode 2b that is closer to the target substrate 4 than the first electrode 2a is. Only surfaces of the first electrode 2a and the second electrode 2b which can be seen in the normal line direction of the target substrate 4 function as plasma discharge surfaces. Thus, a high quality film is realized even at a low target substrate temperature, and the film formation is performed with high gas dissociation efficiency.
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申请公布号 |
US2004137647(A1) |
申请公布日期 |
2004.07.15 |
申请号 |
US20030684819 |
申请日期 |
2003.10.15 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
MIYAZAKI ATSUSHI;HATANO AKITSUGU;SAKAI OSAMU |
分类号 |
H01L21/3065;C23C16/509;H01J37/32;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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