发明名称 |
Method and apparatus for removing backside edge polymer |
摘要 |
A method and apparatus for removing a deposited layer on a bottom surface of a substrate, the deposited layer proximate to an edge of the substrate. The method comprises: providing a chuck for supporting the bottom surface of the substrate, an peripheral portion of the bottom surface proximate to the edge extending past a periphery of the chuck; positioning a shield spaced away from and over a top surface of the substrate, a bottom surface of the shield opposite a top surface of the substrate; directing a reactant containing gas to the bottom surface of the substrate proximate to the edge of the substrate; and converting the reactant gas to a reactant species, the reactant species reacting with the deposited layer in order to cause removal of the deposited layer from the substrate.
|
申请公布号 |
US2004137745(A1) |
申请公布日期 |
2004.07.15 |
申请号 |
US20030341275 |
申请日期 |
2003.01.10 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HOUGHTON THOMAS F.;JONES BRADLEY P.;SMETANA PAVEL;WILDMAN HORATIO S. |
分类号 |
H01L21/00;H01L21/311;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|