发明名称 HIGH ELECTRON MOBILITY EPITAXIAL SUBSTRATE
摘要 <p>A compound semiconductor epitaxial substrate which is used for a pseudomorphic high-electron-mobility field-effect transistor and comprises an InGaAs layer as a strained channel layer (6) and AlGaAs layers containing n-type impurities as backside and frontside electron supply layers (3, 9) is disclosed. The strained channel layer (6) is formed to have an emission peak wavelength not less than 1030 nm at 77 K through optimization of the In proportion in the strained channel layer (6) and film thickness.</p>
申请公布号 WO2004059742(A1) 申请公布日期 2004.07.15
申请号 WO2003JP16393 申请日期 2003.12.19
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED;SUMIKA EPI SOLUTION COMPANY, LTD.;OSADA, TAKENORI;INOUE, TAKAYUKI;FUKUHARA, NOBORU 发明人 OSADA, TAKENORI;INOUE, TAKAYUKI;FUKUHARA, NOBORU
分类号 H01L21/338;H01L29/778;H01L29/812;H01L29/201;(IPC1-7):H01L29/778;H01L21/205 主分类号 H01L21/338
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