| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron beam diffracting device capable of arbitrarily selecting a shape of a measurement area and making a display easily to be confirmed by superimposing a diffractive measurement area on a microscope image in which a blurred diffractive figure is not confirmed. <P>SOLUTION: This device has an electron beam generating source; an electron beam converging means; and a deflection means, records and/or images an electron diffractive pattern result from a target sample, keeps a convergent half angularα(rad) of an electron beam atα<1×10<SP>-3</SP>(1), and a diameter D (nm) of the electron beam at D<1.22×λ/α(λis a wavelength of the electron beam) (2) so as to control a spot position of the electron beam on a target sample surface, and sets a misalignmentδ(rad) of an axis of the electron beam resulting from movement of an irradiation position of the electron beam so as to establish a relation ofδ<α(3) when the irradiation position of the electron beam is moved maximum. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
