SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To effectively recover raw materials by enhancing a cooling efficiency. SOLUTION: The substrate treatment apparatus is provided with: a reaction chamber where a substrate is treated; an exhaust tube where exhaust gas is exhausted from the reaction chamber; a recovery means 40 provided at the exhaust tube, and where the exhaust gas is cooled to change the phase of a raw material in the exhaust gas, and the raw material is recovered. The recovery means is provided with a plurality of capillaries 52 shunting the exhaust gas flow at the inside of the recovery means. COPYRIGHT: (C)2004,JPO&NCIPI