| 摘要 |
PROBLEM TO BE SOLVED: To provide a roller conveyor for conveying substrates without any damage during conveyance when conveying flat objects to be conveyed such as LCDs and PDPs. SOLUTION: Rotary rollers 3 are provided at both the left and right ends of each support shaft 30, and are arranged side by side to compose a conveyance path (a). An air blowoff path 4 is arranged at the middle section of the conveyance path (a), and is installed over the entire length of the conveyance path (a). The upper surface of the air blowoff path 4 is formed to be a flat, porous surface 4a having breathing properties. Air is jetted out of the upper surface toward the lower surface of a flat object (b) traveling on the porous surface 4a. A thin air layer is created between them. Then, the center section of the flat object (b) is lifted without any contact. More specifically, since the center section of the flat object (b) can be maintained in a non-contact state by a thin air layer, conveyance can be made smooth, and damage such as friction scratches to the flat object (b) can be avoided in a conveyance process. COPYRIGHT: (C)2004,JPO&NCIPI
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