OPTICAL DEVICE AND METHOD FOR FABRICATING THE SAME

摘要

A waveguide device and input/output optical fiber modules are formed using a same SOI (silicon on insulator) substrate to make them enable to be aligned easily and accurately without expensive alignment device. The insulating layer of the SOI substrate can be an etch stopper to make U grooves to install optical fibers, and the core layer for the waveguide is formed after a part of the substrate to make the heigths of all elements same.