| 摘要 |
A method of substrate eccentricity detection includes includes determining at least three positions on a perimeter of a first substrate, grouping the at least three perimeter positions to define one or more circles, estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions, and 'determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first. substrate rests. |
