发明名称 PUSH/PULL ACTUATOR FOR MICROSTRUCTURES
摘要 <p>A relay (10) for switching an electrical signal includes switching elements(14, 18), an actuator (12) for closing the switch (18), and an actuator for opening the switch (12), the latter two of which are mechanically decoupled when the relay (10) is in a mechanical rest position. When a relay close signal is applied, the closing actuator (18) electrostatically drives the switching elements (14, 18) to complete a signal path between two terminals for the switched signal (22,24). In the process of closing the switch, the opening actuator (12) remains stationary, i.e., no mass is displaced. Application of a switch open signal electrostatically drives the opening actuator, optionally in combination with a mechanical restoring force on the closing actuator (18) to open the switch (18) to break the signal conduction path for the switched signal.</p>
申请公布号 WO2004059678(A1) 申请公布日期 2004.07.15
申请号 WO2002US41482 申请日期 2002.12.26
申请人 KIONIX, INC. 发明人 ADAMS, SCOTT, G.;MILLER, SCOTT, A.
分类号 B81B3/00;H01L21/762;(IPC1-7):H01H51/22 主分类号 B81B3/00
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