| 摘要 |
An improved UV-curable polymerizable mixture comprises a compensation agent, a photoinitiator, and optionally, a cross-linker. Upon curing, the polymerizable mixture becomes a polymer that is more readily removable (e.g., by solvent or ion etching) than conventional UV-cured polymers. The improved polymerizable mixtures may be used in soft lithography applications, for example, as a mask used to protect a portion of an underlying layer during an etching process. The polymerizable mixture may also be used in other applications including, without limitation, during micromachining, in MEMS, as an optical cladding, as a coating, as an adhesive, as a sealant, as a potting medium, as an encapsulant, or for waterproofing.
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