| 发明名称 |
Transfer and loading station for mobile, electrostatic substrate holder (chuck) has mobile, electrostatic handling device or large area vacuum tweezers with which thin substrates are placed manually |
| 摘要 |
<p>The transfer and loading station has a mobile, electrostatic handling device or large area vacuum tweezers with which the placing of thin substrates is carried out manually. A specimen table (3) has nozzles (10) for producing an air cushion for holding the substrate (1) and/or chuck (2) in a floating condition during adjustment and centering with an adjustment device (5).</p> |
| 申请公布号 |
DE202004006092(U1) |
申请公布日期 |
2004.07.15 |
| 申请号 |
DE20042006092U |
申请日期 |
2004.04.16 |
| 申请人 |
PROTEC GESELLSCHAFT FUER WERKSTOFF- UND OBERFLAECHENTECHNIK MBH |
发明人 |
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| 分类号 |
H01L21/68;H01L21/683;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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