| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric element having no polarization process by a gas deposition method. <P>SOLUTION: The method for manufacturing the piezoelectric element comprises a process of forming a piezoelectric film by using a gas deposition method on a substrate. The process of forming the piezoelectric film uses ultrafine particles of piezoelectric material having perovskite structure, and applies an electric field to the ultrafine particles while the ultrafine particles are discharged from a discharging means and move to a substrate. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
